Optical Interferometry Microscope for Surface Topography Measurement

Measurement of surface topography of magnetic tapes by Mirau interferometry.

Stylus-profiling techniques cannot be used for surface characterization of polymeric surfaces, such as magnetic tapes, because of their relatively low hardness An interferometric-optical-profiling microscope system was used to obtain high-accuracy surface profiles of magnetic media, rapidly and without physical contact with the sample. The profilometer consists of a conventional, reflection-typ...

Development and calibration of wavelength scanning interferometry for surface topography measurement

................................................................................................................................ 4 Table of

Optical coherence tomography for quantitative surface topography.

We address the measurement and correction of fan distortion in optical coherence tomography (OCT). This effect arises from the scanning system configuration and prevents one, in general, from obtaining quantitative topographic data from OCT. Computer simulations allowed us to quantify the effect and evaluate its dependence on the scanning mirror separation and design of the collimating lens, as...

Direct measurement of lattice spacing on crystalline surface using scanning tunneling microscope and laser interferometry

Actively stabilized optical fiber interferometry technique for online/in-process surface measurement.

In this paper, we report the recent progress in optical-beam scanning fiber interferometry for potential online nanoscale surface measurement based on the previous research. It attempts to generate a robust and miniature measurement device for future development into a multiprobe array measurement system. In this research, both fiber-optic-interferometry and the wavelength-division-multiplexing...